Methods for Microelectronics Fabrication and Packaging Using a Magnetic Polymer

ABSTRACT

A magnetic polymer for use in microelectronic fabrication includes a polymer matrix and a plurality of ferromagnetic particles disposed in the polymer matrix. The magnetic polymer can be part of an insulation layer in an inductor formed in one or more backend wiring layers of an integrated device. The magnetic polymer can also be in the form of a magnetic epoxy layer for mounting contacts of the integrated device to a package substrate.

RELATED APPLICATIONS

This application is a divisional of U.S. Patent Application No.15/053,747, entitled “Systems and Methods for MicroelectronicsFabrication and Packaging Using a Magnetic Polymer,” filed on Feb. 25,2016, which is hereby incorporated by reference.

TECHNICAL FIELD

The present application is directed to fabrication and packaging ofintegrated multiple wiring layer devices having an inductor integratedinto at least one wiring layer.

BACKGROUND

The increase in computing power and spatial densities in semiconductorbased devices and energy efficiency of the same allow for ever moreefficient and small microelectronic sensors, processors and othermachines. These have found wide use in mobile and wireless applicationsand other industrial, military, medical and consumer products.

Even though computing energy efficiency is improving over time, thetotal amount of energy used by computers of all types is on the rise.Hence, there is a need for even greater energy efficiency. Most effortsto improve the energy efficiency of microelectronic devices has been atthe chip and transistor level, including with respect to transistor gatewidth. However, these methods are limited and other approaches arenecessary to increase device density, processing power and to reducepower consumption and heat generation at the same time.

One field that can benefit from the above improvements is switchedinductor power conversion devices. Power supplies include powerconverters that convert one form of electrical energy to another. Aregulated power supply is one that controls the output voltage orcurrent to a specific value; the controlled value is held nearlyconstant despite variations in either load current or the voltagesupplied by the power supply's energy source.

In microelectronics fabrication, polymer-based materials are used forphotoresists, which are photoimageable (light-sensitive) materials usedin photolithography. Photolithography is a process that is used topattern films or substrates of microelectronic components for devicefabrication. Photoresists such as polyimide can also provide electricalinsulation in fabricated devices. Such photoresists are thermosetpolymers that are deposited, patterned, and cured during fabrication.Once cured, these polymers also provide excellent mechanical and thermalstability and chemical resistance. Curing is a type of heat treatmentthat is dependent on the temperature, time and ambient environment. Forfabrication of CMOS compatible thin-film inductors, photoresist polymersare cured to provide permanent electrical insulation between theinductor coils and the magnetic core layers. In addition, the curedphotoresist polymers provide stress-relief due to the presence of largetensile or compressive stresses in adjacent metal and magnetic layers.

Underfill epoxies were developed to increase the reliability of solderbumps and allow for flip chip assembly, a lower cost assembly method formicroelectronic components on substrates. These epoxies arepolymer-based materials that provide electrical insulation and adhesionbetween microelectronic components. They mitigate the stressesassociated with thermal mismatch between electronic packaging andsilicon layers. They also alleviate stresses resulting from electrical,mechanical and thermal cycling typical in microelectronic operation.Underfill epoxies are typically thermoset polymers that are in a viscousstate that changes irreversibly into an insoluble polymer network bycuring. These epoxies are composites of a polymer resin and hardenerthat are selected based on the required viscosity, or “ability to flow,”of the underfill between the components. The viscosity of the underfillepoxy is important because the epoxy needs to fill any voids between themicroelectronic components to which the epoxy is providing adhesionbefore the it is cured. The curing process causes reactions to takeplace between the resin and hardener that results in cross-linking wherethe precursor materials rigidize into a network of permanently shapedmolecules. A cured underfill epoxy provides excellent mechanical andthermal stability.

SUMMARY

The following description and drawings set forth certain illustrativeimplementations of the disclosure in detail, which are indicative ofseveral exemplary ways in which the various principles of the disclosuremay be carried out. The illustrative examples, however, are notexhaustive of the many possible embodiments of the disclosure. Otherobjects, advantages and novel features of the disclosure will be setforth in the following detailed description of the disclosure whenconsidered in conjunction with the drawings.

In an aspect, the invention is directed to a method of fabricating astructure. The method includes disposing a plurality of ferromagneticparticles in an epoxy matrix to form a magnetic epoxy. The method alsoincludes mounting a package substrate on a plurality of contacts of asemiconductor integrated circuit or an integrated passive device,wherein the contacts define a gap between the substrate and thesemiconductor integrated circuit or the integrated passive device, thesemiconductor integrated circuit or the integrated passive devicecomprising a multilevel wiring network and an inductor, the inductorintegrated into at least one level of the multilevel wiring network. Themethod also includes flowing the magnetic epoxy into the gap, themagnetic epoxy substantially surrounding the contacts. The method alsoincludes curing the magnetic epoxy to adhere the substrate to thesemiconductor integrated circuit or the integrated passive device.

In one or more embodiments, the method also includes applying a magneticfield while flowing the magnetic epoxy, the magnetic field drawing themagnetic epoxy into the gap. In one or more embodiments, the method alsoincludes applying a magnetic field while curing the magnetic epoxy, themagnetic field configured to align an easy axis of magnetization of themagnetic epoxy with an axis parallel to a height of the magnetic epoxy,thereby aligning a hard axis of magnetization of the magnetic epoxy witha plane parallel to the package substrate.

In one or more embodiments, the inductor is formed by depositing amagnetic material and depositing a photoresist on said magnetic materialto form a laminate structure. In one or more embodiments, thephotoresist comprises a magnetic polymer. In one or more embodiments,the inductor includes a core formed by (a) depositing a magneticmaterial to form a first layer and (b) depositing said magnetic materialon said first layer in an oxygen-rich environment to form an insulatinglayer on said first layer of said magnetic material, said insulatinglayer comprising an oxide of said magnetic material. In one or moreembodiments, the inductor includes a core formed by (a) depositing amagnetic material to form a first layer and (b) exposing said firstlayer to an oxygen-rich environment to form a thermal oxide on saidfirst layer. In one or more embodiments, the inductor includes a coreformed by (a) depositing a magnetic material to form a first layer and(b) depositing a magnetic polymer on said first layer.

In one or more embodiments, the method also includes forming saidinductor from a planar magnetic core and a conductive winding, whereinsaid planar magnetic core has a principal plane; and orienting saidprincipal plane in parallel with wiring planes of said multilevel wiringnetwork. In one or more embodiments, the method also includes turningsaid conductive winding around in a generally spiral manner on theoutside of said planar magnetic core; and constructing said conductivewinding piecewise of wire segments and of vertical interconnect accesses(VIAs), wherein said wire segments pertain to at least two of saidwiring planes and said VIAs are interconnecting said at least two wiringplanes. In one or more embodiments, the method also includes disposing amagnetic polymer around said core, wherein the magnetic polymer forms anelectrically insulating layer around said core. In one or moreembodiments, the method also includes applying a magnetic fieldconfigured to align a hard axis of magnetization of the magnetic polymerin parallel with said magnetic core plane.

IN THE DRAWINGS

For a fuller understanding of the nature and advantages of the presentinvention, reference is be made to the following detailed description ofpreferred embodiments and in connection with the accompanying drawings,in which:

FIG. 1 illustrates a side view of a magnetic polymer layer according toan embodiment;

FIG. 2 illustrates a cross section of an exemplary inductor according toan embodiment;

FIG. 3 illustrates an exemplary core having a laminated structureaccording to an embodiment;

FIG. 4 is a graphical abstraction of an exemplary laminated, integratedinductor disposed on a silicon substrate according to an embodiment;

FIG. 5 is a schematic cross sectional view of an integration of aninductor into the multilevel wiring network, or BEOL, of a semiconductorIC according to an embodiment;

FIG. 6 illustrates a side view of a package assembly according to anembodiment;

FIG. 7 illustrates an exploded view of the package assembly from FIG. 6;

FIG. 8 illustrates a second exploded view of the package assembly fromFIG. 6 to illustrate the current flow and resulting magnetic flux;

FIG. 9 is a flow chart that illustrates a method of manufacturing apackaged integrated device according to an embodiment; and

FIG. 10 is a flow chart that illustrates a method of manufacturing anintegrated device according to an embodiment.

DETAILED DESCRIPTION

Aspects of the present invention relate to soft ferromagnetic particlesembedded in a polymer matrix to create a ferromagnetic polymer compositematerial, hereafter referred to as a “magnetic polymer,” inmicroelectronic fabrication and assembly. Utilizing the magnetic polymeras an insulating and/or stress-relief layer(s) in microelectronicfabrication and/or as an underfill epoxy in microelectronic assemblyenables enhancement of the inductance of microelectronic devicescontaining magnetic components.

FIG. 1 illustrates a side view of a magnetic polymer layer 10 accordingto an embodiment. The magnetic polymer layer 10 includes ferromagneticparticles 110 disposed in a polymer matrix 120. The ferromagneticparticles 110 are formed of one or more soft ferromagnetic materials oralloys or oxides thereof. For example, the ferromagnetic particles 110can include at least one of Co, Ni, Fe, and/or their respective oxides.The ferromagnetic particles 110 can have a size (e.g., length ordiameter), an average size, or a median size of less than or equal toabout 10 microns, for example about 2 to about 7 microns, about 3 toabout 6 microns, or about 5 microns, or about 5 to about 100 nanometers.As used herein, “about” means plus or minus 10% of the relevant value.

The polymer matrix 120 can be a dielectric (e.g., liquid or spin-ondeposited dielectric) such as silicon dioxide (SiO2), a photoimageablepolymer (e.g., a photoresist) such as a polyimide,polymethylmethacrylate or polydimethylsiloxane, or a non-photoimageablepolymer such as a polyimide or epoxy.

The magnetic polymer can be manufactured by disposing ferromagneticparticles in the polymer matrix and mixing the constituent parts usingany mixing method that provides an approximately homogeneousdistribution of the ferromagnetic particles in the polymer matrix. Thehomogeneous distribution is determined by achieving a similarconcentration (e.g., plus or minus 10% variation in concentration) offerromagnetic particles per unit volume across the entire volume of thepolymer matrix.

FIG. 2 illustrates a cross section of an exemplary inductor 20 accordingto an embodiment. The inductor 20 can be deployed in an electricalsystem such as a voltage regulator, a power converter (e.g., anintegrated power converter), a radio-frequency (RF) signal chain, anelectrical impedance matching network, or a similar device. The inductor20 includes first and second conductor layers 210, 220 that areelectrically connected by conducting VIAs 230, 240. The conductor layers210, 220 and VIAs 230, 240 form a conductive winding or coil around amagnetic core 250. The magnetic core 250 can include several layers ofelectrically insulting materials that prevent the magnetic core orinductor coil from electrically coupling in an undesirable way. Theseinsulating materials are generally vapor deposited dielectrics such asSiO2 or photoimageable polymer layers such as polyimide. In someembodiments, the core 250 includes a magnetic layer and a non-magneticlayer or a plurality of such layers in a laminate configuration ofalternating magnetic and non-magnetic layers. An example of a magneticcore, including a core having a laminate configuration, can be found inU.S. patent application Ser. No. 13/609,391 and U.S. patent applicationSer. No. 14/571,649, which are incorporated herein by reference. The'391 and '649 applications are assigned to the same assignee as thepresent application. An additional example of a laminate configurationis described below with respect to FIG. 3.

A magnetic polymer 260 surrounds the core 250, either completely orpartially, to form a passivation and insulation layer between the core250 and one or more of the respective electrical conductors (e.g.,conductor layers 210, 220 and vias 230, 240). The magnetic polymer 260can be the same or substantially the same as magnetic polymer layer 10described above. The weight ratio of ferromagnetic particles (e.g.,ferromagnetic particles 110) to polymer or insulator (e.g., polymermatrix 120) can range from about 1:10 to the highest weight ratio offerromagnetic particles to polymer that allows for the polymer to besuccessfully processed as a passivation or insulation layer (e.g. allowsthe polymer to have a low enough viscosity to be able to spin on thewafer or substrate completely for photolithography processing). Thehighest weight ratio of ferromagnetic particles to polymer is typicallyabout 1:1 in some embodiments.

An advantage of using magnetic polymer 260 in inductor 20 is that it canprovide a net increase in the effective inductance of the inductor 20 byreducing the total magnetic reluctance for magnetic flux induced by theinductor coil, which is composed of electrical conductors (conductorlayers 210, 220 and vias 230, 240). As a result, the inductor 20exhibits an inductance enhancement and conversion efficiency improvementfor power converter systems where embodiments of the invention can beapplied.

Further, magnetic polymer 260 can attenuate radiated electromagneticenergy from power inductor devices to reduce undesirable electromagneticinterference (EMI). This EMI benefit can also be applied to otherelectrical circuit applications that either generate EMI or areadversely affected by EMI, where the attenuation of EMI is desirable.

In some embodiments, the magnetic polymer 260 can be biased with amagnetic field to form an anisotropic structure, as discussed below.

FIG. 3 illustrates an exemplary core 30 having a laminated structure.The core stack 30 includes more than two (N) laminations of magneticmaterial layers 31, 32, 33. One skilled in the art can appreciate thelimit to number N of stacks is a practical, engineering consideration.

Each magnetic layer 31, 32, 33 is separated by insulating layers 34, 35and optional interface layers 36, 37. For example, soft magnetic layers31, 32 are separated by insulating layer 34 and interface layer 36 andso forth. One or both insulating layers 34, 35 can include the magneticpolymer 10, 260 described above. The core stack 30 can also besurrounded by a magnetic polymer, for example similar to theconfiguration illustrated in FIG. 2. In addition or in the alternative,one or both insulating layers 34, 35 be an oxide (or other variant) of afirst magnetic material used for magnetic layer 31, 32, and/or 33. Suchan oxide can be formed by exposing the underlying magnetic film layer(e.g., layer 31) to an oxygen-rich environment, which can promote thegrowth of a thermal oxide as electrically insulating layer (e.g., layer34). Alternatively, the electrically insulating layer 34, 35 can beformed by depositing the first magnetic material in an oxygen-richenvironment so that the first magnetic material is oxidized as it isdeposited to form electrical insulating layer 34, 35.

As illustrated in FIG. 3, first insulating layer 34 is disposed betweenfirst magnetic layer 31 and second magnetic layer 32. First interfacelayer 36 is disposed between the first magnetic layer 31 and the secondmagnetic layer 32. Specifically, the first interface layer 36 isdisposed between the second magnetic layer 32 and the first insulatinglayer 34. Alternatively, the first interface layer 36 can be disposedbetween the first magnetic layer 31 and the first insulating layer 34.

Laminated plurality stack 30 also includes third magnetic layer 33 wherethe second magnetic layer 32 is disposed between the first magneticlayer 31 and the third magnetic layer 33. Second insulator 35 isdisposed between the second magnetic layer 32 and the third magneticlayer 33. Second interface layer 37 is disposed between the secondmagnetic layer 32 and the third magnetic layer 33. Specifically, thesecond interface layer 37 is disposed between the third magnetic layer33 and the second insulating layer 35. Alternatively, the secondinsulating layer 33 can be disposed between the third magnetic layer 33and the second interface layer 37.

Laminated plurality stack 30 can include a fourth (or additional)magnetic layer where the third magnetic layer 33 is disposed between thesecond magnetic layer 32 and the fourth magnetic layer 33. An insulatorlayer and/or an interface layer can be included between the fourthmagnetic layer and the third magnetic layer 33 in the same arrangementas the rest of the laminated plurality stack 30 described above.

Magnetic layers 31, 32 can comprise soft ferromagnetic materials. Softferromagnetic materials have a number of useful applications withincircuits and microelectronic applications. They exhibit highpermeability and low coercivity; two properties that are useful forenhancing inductance. Suitable soft magnetic materials employed in oneor more embodiments comprise alloys containing at least one of Co, Ni orFe.

The use of an oxide (or other variant) of the first magnetic materialcan provide benefits in manufacturing cost and throughput by reducingthe total number of unique deposition process employed in devicefabrication. In addition or in the alternative, the use of an oxide ofthe first magnetic material can provide benefits in device reliabilitybecause the material similarities between the first magnetic material(e.g., layer 31) and an oxide of the first magnetic material (e.g.,layer 34) can improve adhesion there between (i.e., adhesion betweenelectrically insulating layer 34 and magnetic film layer 31 and/or 32).Also, an oxide of the first magnetic material can reduce mechanicalstress at the interfaces between electrically insulating layer 34 andmagnetic film layer 31 and/or 32. If adhesion between adjacent materiallaminations is poor, the material stack may delaminate during devicefabrication or during use in the field by the end user. If significantmechanical film stress (e.g., less than −250 MPa (compressive stress) orgreater than 250 MPa (tensile stress)) is present at these interfaces,such mechanical film stress can negatively impact the magneticproperties of magnetic film layer 31 and/or 32 when the materialscomposing those layers exhibit non-zero magnetostriction, which is thephysical phenomenon that relates film stress and magnetization inferromagnetic materials.

Each lamination N is thin (about 1 nm to about 500 nm) and electricallyisolated. The thickness of each electrically insulating layer (e.g.,layer 34) can be selected to provide adequate resistance between any twoadjacent magnetic laminations (e.g., layers 31 and 32) to suppress eddycurrents, and also to promote dipolar coupling between adjacent magneticlaminations. The thickness of each electrically insulating layer (e.g.,layer 34) can be determined by the material system of the insulatinglayer, the method of material synthesis, the quality of the insulatinglayer 34/magnetic film layer 31, 32 interface and/or the electricalproperties of the insulating layer 34. For the purpose of reducing eddycurrent losses, the combined thickness and resistivity of the insulatinglayer 34 can be selected so that the skin depth for the laminatedmagnetic core 30 is greater than the thickness of a single magneticlamination. Eddy currents can be a major source of loss at highfrequencies.

In addition or in the alternative, the electrically insulating layer 34can promote dipolar coupling between adjacent magnetic laminations(e.g., magnetic film layers 31 and 32). Dipolar coupling betweenadjacent magnetic laminations is desirable because it can provide formagnetic flux closure between the magnetic laminations. Without dipolarcoupling, flux closure can occur within individual magnetic laminations,which can lead to a larger number of magnetic domains and consequently alarger number of domain walls, increasing the coercivity of the magneticfilm layer. When a closed path for magnetic flux is formed between twoadjacent magnetic laminations, there can be reduced occurrence ofmagnetic domain walls and, consequently, there can be improved magneticcoercivity for the structure.

Laminations of soft magnetic materials are integrated with otherelectronic circuits on a single, or multiple semiconductor substrates,in order to improve inductance, or to provide additional functionalitythat would not otherwise be available on an integrated circuit.Specifically, the integration of magnetic films enables efficientswitched inductor power conversion. The laminated magnetic film ismagnetically coupled to a coil or strip line that is composed of one ormore layers of electrical conductor, in order to provide a high qualityinductance with low resistance through the conductive element.

FIG. 4 is a graphical abstraction of an exemplary laminated, integratedinductor 40 disposed on a silicon substrate 41. At the heart of theintegrated inductor 40 is laminated plurality stack 30. Laminatedplurality stack 30 is disposed under and on top but electricallyinsulated from electrical conduction layers 44, 47. The conductor in thepresent embodiment are electrically conductive vertical interconnectaccesses (VIAs) 45, 46 and are in electrical communication (e.g., indirect or indirect connection) with electrical conduction layers 44, 47,at least in part. However, electrical interconnect 44, 45, 46, 47 can beany suitable electrical conductor such as a trace, wire or VIA.Depending on application, the electrical interconnect 44, 45, 46, 47 isconstructed to compose one or more coils, with magnetic core 30 at thecenter. In some embodiments, the electrical conduction layers 44, 47 arein electrical contact (e.g., in direct physical contact) with VIAs 45,46.

The electrical interconnect 44, 45, 46, 47 that compose one or moreinductor coils are magnetically coupled to laminated stack 30. Power istransmitted between front-end-of-line (FEOL) transistor layer 42 and theone or more inductors composed of 30, 44, 45, 46, 47 through electricalinterconnect 43. Electrical interconnect layers 44, 47 and VIA layers45, 46 are a cross-section of an electrical winding that wraps aroundthe laminated plurality stack 30 to form an inductor as described above.FEOL is the first portion of integrated circuit (IC) fabrication wherethe individual devices (transistors, capacitors, resistors, etc.) arepatterned in the semiconductor. FEOL generally covers everything up to(but not including) the deposition of metal interconnect layers 44, 47.

FIG. 5 is a schematic cross sectional view of an integration 50 of aninductor into the multilevel wiring network, or BEOL, of a semiconductorIC. The figure shows symbolically represented circuit components 530,such as CMOS devices, have been processed on a semiconductor substrate520. The devices may be any kind, planar or three dimensional FinFETtype, and the substrate, as well, any kind, bulk, SOI, Si-based, or someother semiconductor based, without limitation. Pertaining to the samedie, and over the semiconductor substrate 520 and the components 530, amultilevel wiring network 540 has been fabricated.

The multilevel wiring network 540 is arranged into wiring planes 542.FIG. 5 depicts 5 wiring planes 542 but without limitation on any actualnumber of planes. Each wiring plane 542 contains wire segments 545.Electrical connections between wiring segments 545 of differing wiringplanes 542 are provided by VIAs 544. Also shown are typical IC chipcontact structures 543, usually referred to in the art as C4 contacts,solder bumps, or copper pillars, but any other contacts for the chip'sexternal communication are acceptable without limitation. The spaces inthe wiring network 540 are typically filled with a dielectric insulatingmaterial 549, of which quite a few are known in the art, such as SiO2.

The schematic depiction of FIG. 5 illustrates an inductor with a singleplanar magnetic core 500 integrated 50 into the multilevel wiringnetwork 540. The principal plane 575 of the planar magnetic core 500 issubstantially parallel with the wiring planes 542. The conductivewinding of the inductor, forming a general spiral on the outside of theplanar magnetic core 500 is piecewise constructed of wire segments 545and of VIAs 544. The wire segments 545 forming the winding pertain to atleast two of the wiring planes 542′ and the VIAs 544′ that form theparts of the windings that are vertical to the principal plane 500 areinterconnecting the at least two wiring planes 542′. The wire segmentunderneath the planar magnetic core 500 is delineated with dashed linesindicating that, depending how the winding spirals are constructed, itmay not be visible in the depicted cross sectional plane. A possiblelead 513 to the windings is also shown.

In state of the art semiconductor ICs the multilevel wiring network 540typically uses Cu and/or Al for wire segments and VIAs, and it isfabricated with a damascene, or dual damascene technique, as known inthe art. Since the planar magnetic core 500 is manufacturable with knownsemiconductor processing methods, for instance, sputtering, orelectroplating, its integration may be seamlessly included into the BEOLprocessing.

Magnetic core 500 can include a laminate configuration havingalternating magnetic and non-magnetic layers. The non-magnetic layerscan be or can include the magnetic polymer 10, 260 described above. Inaddition or in the alternative, the core 500 can be partially orcompletely surrounded by a magnetic polymer, for example similar to theconfiguration illustrated in FIG. 2.

By way of example, without intent of limiting, the magnetic layer corecan include CZT, or Co(X)Zr(Y)Ta(1-X-Y), with X and Y beingapproximately 0.915 and 0.04, respectively. The non-magnetic layer maybe composed of more than one constituent layers. Again, by way ofexample, these component layers may be an insulator layer, such as SiO2,CoO, or a magnetic polymer, and a metal layer, such as Ta. The purposeof the insulating layer is to prevent electrical current circulation inthe planar magnetic core perpendicularly to the principal plane (i.e.,eddy currents), as discussed above. The purpose of the metal layer canbe to ease fabrication by smoothing the surface during deposition. Thenon-magnetic layer may have structures and properties beyond those ofsimply having constituent layers. In some embodiments of the presentinvention the non-magnetic layer may have current rectifying properties.

The sequential deposition of the various layers of core 500 may includesome techniques known in the semiconductor processing arts, forinstance, masking, sputtering, electroplating. The fabrication of thecore 500 may be done in the presence of an applied magnetic field tohelp with the orientation of the deposited magnetic layers. Thethickness of the non-magnetic layers may be in the range of about 5 nmto about 100 nm, while the magnetic layer thickness may be in the rangeof about 10 nm to about 1,000 nm, more typically between about 50 nm toabout 500 nm. Of course, one may be able to apply other magneticmaterials, such as Ni and Fe, and other layers, or means, to suppresseddy currents. Embodiments of the present invention do not limit any ofthese choices.

FIG. 6 illustrates a side view of a package assembly 60 according to anembodiment. The assembly 60 includes an integrated circuit 600,inductors 610, underfill epoxy layer 620, and substrate 630. As shown inFIG. 6, the integrated circuit 600 is electrically connected toinductors 610 a-c (generally inductors 610), for example through backendwiring to an integrated processor. The integrated circuit 600 andinductors 610 are disposed or packaged on substrate 630 with epoxy layer620. In some embodiments, integrated circuit 600 can be replaced with anintegrated passive device (IPD). The epoxy layer 620 may be comprised ofa magnetic polymer material, as discussed above. Contacts 675, such asC4 contacts or the like, are disposed between integrated circuit 600 andsubstrate 630 to provide an electrical path therebetween.

The magnetic epoxy can be manufactured by disposing ferromagneticparticles in the epoxy matrix and mixing the constituent parts using anymixing method that provides an approximately homogeneous distribution ofthe ferromagnetic particles in the epoxy matrix. The ferromagneticparticles can have a size (e.g., length or diameter), an average size,or a median size of less than or equal to about 10 microns, for exampleabout 2 to about 7 microns, about 3 to about 6 microns, or about 5microns, or about 5 to about 100 nanometers.

The homogeneous distribution is determined by achieving a similarconcentration (e.g., plus or minus 10% variation in concentration) offerromagnetic particles per unit volume across the entire volume of theepoxy matrix. The weight ratio of ferromagnetic particles to epoxy canrange from about 1:10 to the highest weight ratio of ferromagneticparticles to polymer that allows for the polymer to be successfullyprocessed as an underfill (e.g. allows the epoxy to have a low enoughviscosity to be able to flow between the parts completely to fill anyvoids between the parts and provide sufficient adhesion once themagnetic epoxy is cured). The highest weight ratio of ferromagneticparticles to epoxy is typically about 1:1 in some embodiments. Theelectrical, thermal and mechanical properties of the resultant magneticpolymer can be similar to conventional underfill epoxies, such as havinga high electrical resistivity, a low thermal resistivity, and/or a highrigidity following the epoxy curing process.

FIG. 7 illustrates an exploded view of package assembly 60 from FIG. 6.In particular, FIG. 7 illustrates an exploded, upside down view of area700 from FIG. 6 (indicated by a dashed line). As illustrated in FIG. 7,the integrated circuit 600 includes a substrate 650 (e.g., silicon) intowhich active regions 655 (e.g., source and drain) have been defined. Theactive regions 655 are connected through backend wiring 640 to contacts675, which connect the wiring 640 to the package substrate 630.

Inductor 610 c is integrated into backend wiring 640, similar to themanner discussed above. Inductor 610 c includes a core 615, which caninclude one or more soft ferromagnetic materials. The core 615 caninclude multiple layers/laminations, including magnetic and non-magneticlayers, as discussed above. The non-magnetic layer can include amagnetic polymer. In addition, the core 615 can optionally be partiallyor completely surrounded by magnetic polymer material 617 (indicated byhashing in FIG. 7).

The integrated circuit 600 and contacts 675 are mounted on packagesubstrate 630 with epoxy layer 620, which includes a magnetic epoxymaterial, as discussed above. To mount the processor 600 and contacts675 on package substrate 630, the epoxy layer 620 flows onto the surfaceof package substrate 630 and surrounds contacts 675. Since the size, theaverage size, or the median size of the ferromagnetic particles in themagnetic epoxy material are less than or equal to about 10 microns, themagnetic polymer material can flow under contacts 675, which generallyare about 30 to about 100 microns in size. After the epoxy layer 620 isin place, it is cured through heat, light, or other means to form asolid material. Depending on the epoxy material used, the curing processcan include heating the epoxy from any temperature between about 20° C.and about 150° C. for between about 3 hours to about 24 hours in aheating apparatus such as a hotplate, oven or furnace. A magnetic fieldcan be applied to epoxy layer 620 during or after curing to inducemagnetic anisotropy in epoxy layer 620. The magnetic field is applied sothat it passes through epoxy layer 620 parallel to its height 625. Inresponse to the magnetic field, the easy axis of magnetization alignswith the magnetic field (i.e., parallel to height 625), which causes thehard axis of magnetization to align orthogonally to height 625. As such,the hard axis of magnetization is parallel or substantially parallel tothe plane defined by package substrate 630 and/or the plane defined byprocessor 600 (e.g., the plane defined by the die on which the processor600 is fabricated). Such alignment techniques are described in furtherdetail in U.S. patent application Ser. No. 14/746,994, entitled“Apparatus and Methods for Magnetic core Inductors with BiasedPermeability,” which is incorporated herein by reference. The '994application is assigned to the same assignee as this application.

FIG. 8 illustrates a second exploded view of package assembly 60 toillustrate the electrical current flow and resulting magnetic flux.Specifically, electrical current 800 flows in the coil around core 615in a clockwise direction. The current 800 induces a magnetic field in aplane orthogonal to current 800 (into the plane of the page). The planeis parallel to the plane defined by the magnetic field flow into 810core 615 (i.e., into the page) and out of 820 epoxy layer 620 (i.e., outof the page).

An integrated power inductor that resides on either an integratedcircuit IC substrate or integrated passive device substrate (e.g.,substrate 650) may have inductors that induce magnetic fluxpredominately parallel to the IC or IPD substrate (solenoid or toroidinductor) or predominately orthogonally to the IC or IPD substrate(planar spiral inductor). For power conversion applications it istypically preferable to have the magnetic flux oriented parallel to thesubstrate plane in order to reduce losses associated with magnetic fluxcoupling, particularly in the presence of a conductive substrate. Theapplication of a magnetic underfill epoxy for an IC or IPD substratewith power inductors radiating magnetic flux parallel to the substrateplane can provide a substantial inductance enhancement and will reduceinductor EMI relative to a similar instance where a non-magneticunderfill epoxy is used.

Likewise, application of a magnetic underfill epoxy for an IC or IPDsubstrate with power inductors radiating magnetic flux orthogonal to thesubstrate plane can provide a substantial inductance enhancement and canreduce inductor EMI relative to a similar instance where a non-magneticunderfill epoxy is used. In FIG. 8, current 800 flowing through the coilaround core 615 induces a magnetic flux into 810 the plane of the pagein the region of the magnetic core 615 and a magnetic flux out of 820the plane of the page in the region of the magnetic underfill epoxy 620.The ferromagnetic particles in the epoxy can provide an increased volumeof magnetic material in close proximity to the magnetic core whichdirectly correlates to an increased inductance of the inductor device610 c. The ferromagnetic particles in the epoxy 620 can also reduce EMIfrom the inductor device 610 c by shielding the magnetic flux 820 towithin the magnetic underfill epoxy layer 620 and not allowing themagnetic flux to approach the package substrate 630 to the same degreeas a similar instance where a non-magnetic underfill epoxy is used.

FIG. 9 is a flow chart that illustrates a method 90 of manufacturing apackaged integrated device according to an embodiment. The method 90includes forming a magnetic epoxy 900. The magnetic epoxy is formed 900by embedding a plurality of ferromagnetic particles in an epoxy matrix.The particles can have a size, an average size, or a median size of lessthan or equal to about 10 microns or any range between about 1 nanometerand about 10 microns, as discussed above. The ferromagnetic particlescan be embedded into the epoxy matrix before or after the epoxy matrixis synthesized and the embedding process can be any process in which theferromagnetic particles are homogeneously mixed within the epoxy matrixproviding a similar concentration (e.g., plus or minus 10% variation inconcentration) of ferromagnetic particles per unit volume of the epoxymatrix across the entire volume of the epoxy matrix. The epoxy matrix issynthesized and manufactured according to the standard process of thatepoxy provided by the epoxy vendor. Any epoxy suitable for electronicpackaging applications can be used with a low viscosity epoxy (e.g.,less than about 5000 cPs at 100 RPM and 23° C.) being preferable. Insome embodiments, the magnetic epoxy can be manufactured by a thirdparty supplier.

In step 910, the integrated device is mounted on a package substrate,for example as discussed above with respect to FIGS. 6-8. The integrateddevice can be an integrated circuit or an IPD having multiple backendwiring layers in which an inductor is formed in one or more of suchwiring layers. The mounting includes disposing the package substrate oncontacts to the last backend wiring layer of the integrated device.Alternatively the mounting includes disposing the contacts on thepackage substrate. In either case, a gap forms between the last backendwiring layer and the substrate in the space between adjacent contacts.

In step 920, the magnetic epoxy is introduced into the gap. The magneticepoxy flows through the gap to surround the contacts and to contact thepackage substrate and the last backend wiring layer. The magnetic epoxyhas a sufficient viscosity to permit such flow. Any epoxy suitable forelectronic packaging applications can be used with a low viscosity epoxy(e.g., less than about 5000 cPs at 100 RPM and 23° C.) being preferable.

In step 930, the magnetic epoxy is cured through exposure to heat, lightor a combination of heat and light, as discussed above. The curingcauses the viscous magnetic epoxy material to crosslink, which resultsin a solid material that adheres to the contacts, package substrate, andlast backend wiring layer.

In optional step 940, a magnetic field is applied during step 920 toinduce the magnetic epoxy to flow into the gap. The magnetic field canbe generated by a permanent magnet or as an electrically induced DCmagnetic field. The magnetic field strength is that necessary to causephysical movement of the magnetic epoxy to flow into the gap, which isdependent on the type of magnetic field and location of the magneticfield with respect to the magnetic epoxy. In addition or in thealternative, a magnetic field is applied during or after step 930 toinduce anisotropy (i.e., setting the easy and/or hard axes ofmagnetization) into the epoxy. The magnetic field can be generated by apermanent magnet or generated as an electrically induced DC magneticfield. The magnetic field is aligned to induce anisotropy of themagnetic epoxy with a hard axis parallel to the hard axis of the planarmagnetic core in the inductor device.

FIG. 10 is a flow chart that illustrates a method 1000 of manufacturingan integrated device according to an embodiment. The method 1000includes step 1010 in which an inductor is integrated into a multilevelwiring network of the integrated device. The integrated device can be anintegrated circuit, an integrated passive device, or similar device. Atleast a portion (e.g., the conductive winding) is integrated into themultilevel wiring network.

In step 1020, the inductor is formed from a planar magnetic core and aconductive winding, as discussed above.

In step 1030, a principal plane of the magnetic core is oriented inparallel with a plane defined by each wiring plane.

In step 1040, the conductive winding is turned or wrapped around themagnetic core in a generally spiral manner.

In step 1050, the conductive winding is constructed piecewise of wiresegments and of vertical interconnect accesses (VIAs). The wire segmentspertain to at least two wiring planes and the VIAs interconnect at leasttwo wiring planes. The VIAs and wiring planes are formed in part bypatterning and etching a photoresist comprising a magnetic polymer.

Therefore it can be seen that the present invention can enhance theinductance values in integrated structures that include an inductor,such as switched power converter inductor. The magnetic polymer can beused as an insulation layer around a magnetic core of an inductor and/oras part of a laminate structure of the core. The magnetic polymer can bein the form of a photoresist for patterning into the desired insulationlayer. In addition or in the alternative, the magnetic polymer can be inthe form of a magnetic epoxy to mount an integrated semiconductor die oran integrated passive device to a package substrate. The magnetic epoxycan enhance the inductance value of an inductor incorporated into theintegrated semiconductor die or the integrated passive device.

The embodiments described and illustrated herein are not meant by way oflimitation, and are rather exemplary of the kinds of features andtechniques that those skilled in the art might benefit from inimplementing a wide variety of useful products and processes. Forexample, in addition to the applications described in the embodimentsabove, those skilled in the art would appreciate that the presentdisclosure can be applied to other applications.

The present invention should not be considered limited to the particularembodiments described above, but rather should be understood to coverall aspects of the invention as fairly set out herein. Variousmodifications, equivalent processes, as well as numerous structures towhich the present invention may be applicable, will be readily apparentto those skilled in the art to which the present invention is directedupon review of the present disclosure.

What is claimed is:
 1. A method of fabricating a structure, the method comprising: disposing a plurality of ferromagnetic particles in an epoxy matrix to form a magnetic epoxy; mounting a package substrate on a plurality of contacts of a semiconductor integrated circuit or an integrated passive device, wherein the contacts define a gap between the substrate and the semiconductor integrated circuit or the integrated passive device, the semiconductor integrated circuit or the integrated passive device comprising a multilevel wiring network and an inductor, the inductor integrated into at least one level of the multilevel wiring network; flowing the magnetic epoxy into the gap, the magnetic epoxy substantially surrounding the contacts; and curing the magnetic epoxy to adhere the substrate to the semiconductor integrated circuit or the integrated passive device.
 2. The method of claim 1, further comprising applying a magnetic field while flowing the magnetic epoxy, the magnetic field drawing the magnetic epoxy into the gap.
 3. The method of claim 1, further comprising applying a magnetic field while curing the magnetic epoxy, the magnetic field configured to align an easy axis of magnetization of the magnetic epoxy with an axis parallel to a height of the magnetic epoxy, thereby aligning a hard axis of magnetization of the magnetic epoxy with a plane parallel to the package substrate.
 4. The method of claim 1, wherein said inductor includes a core formed by depositing a magnetic material and depositing a photoresist on said magnetic material to form a laminate structure.
 5. The method of claim 4, wherein said photoresist comprises a magnetic polymer.
 6. The method of claim 1, wherein said inductor includes a core formed by (a) depositing a magnetic material to form a first layer and (b) depositing said magnetic material on said first layer in an oxygen-rich environment to form an insulating layer on said first layer of said magnetic material, said insulating layer comprising an oxide of said magnetic material.
 7. The method of claim 1, wherein said inductor includes a core formed by (a) depositing a magnetic material to form a first layer and (b) exposing said first layer to an oxygen-rich environment to form a thermal oxide on said first layer.
 8. The method of claim 1, wherein said inductor includes a core formed by (a) depositing a magnetic material to form a first layer and (b) depositing a magnetic polymer on said first layer.
 9. The method of claim 1, further comprising: forming said inductor from a planar magnetic core and a conductive winding, wherein said planar magnetic core has a principal plane; and orienting said principal plane in parallel with wiring planes of said multilevel wiring network.
 10. The method of claim 9, further comprising: turning said conductive winding around in a generally spiral manner on the outside of said planar magnetic core; and constructing said conductive winding piecewise of wire segments and of vertical interconnect accesses (VIAs), wherein said wire segments pertain to at least two of said wiring planes and said VIAs are interconnecting said at least two wiring planes.
 11. The method of claim 10, further comprising disposing a magnetic polymer around said core, wherein the magnetic polymer forms an electrically insulating layer around said core.
 12. The method of claim 11, further comprising applying a magnetic field configured to align a hard axis of magnetization of the magnetic polymer in parallel with said magnetic core plane. 